Name: Real-time monitoring tool for plasma-sputtering process
The COE. Adv. Mat. Eng. Is conducting R&D in the area of plasma diagnostics. Particularly, is developing a Sputter plasma monitoring system that can provide real-time non-invasive plasma characterization to improve sputtering coating yield. This new tool will apply new THz fusion plasma diagnostic technologies and it is intended to improve industrial sputtering plasma processes.